๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Electrical properties of piezoelectric aluminium nitride films deposited by reactive dc magnetron sputtering

โœ Scribed by Elmazria, O. ;Assouar, M. B. ;Renard, P. ;Alnot, P.

Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
152 KB
Volume
196
Category
Article
ISSN
0031-8965

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Aluminium nitride thin films deposited b
Aluminium nitride thin films deposited by DC reactive magnetron sputtering
โœ V. Dimitrova; D. Manova; T. Paskova; Tz. Uzunov; N. Ivanov; D. Dechev ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 375 KB

AlN-films prepared by dc reactive magnetron sputtering. AlN in an Ar+N 2 gas mixture have been prepared and their microstructure, hardness, refractive index and IR transmittance examined. At l = 640 nm the refractive index was 1.93 and k = 3ร—10 -3 ; high transmission occurred between [??] structure