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Properties of Al-doped copper nitride films prepared by reactive magnetron sputtering

✍ Scribed by Xing’ao Li; Zuli Liu; Anyou Zuo; Zuobin Yuan; Jianping Yang; Kailun Yao


Book ID
107403540
Publisher
Wuhan University of Technology
Year
2007
Tongue
English
Weight
380 KB
Volume
22
Category
Article
ISSN
1000-2413

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