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Optical band gap of zinc nitride films prepared on quartz substrates from a zinc nitride target by reactive rf magnetron sputtering

โœ Scribed by Fujian Zong; Honglei Ma; Wei Du; Jin Ma; Xijian Zhang; Hongdi Xiao; Feng Ji; Chengshan Xue

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
195 KB
Volume
252
Category
Article
ISSN
0169-4332

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Optical band gap of zinc nitride films prepared by reactive rf magnetron sputtering
โœ Wei Du; Fujian Zong; Honglei Ma; Jin Ma; Min Zhang; Xianjin Feng; Hua Li; Zhigan ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 130 KB

Polycrystalline Zn 3 N 2 films are prepared on Si and quartz glass substrates by RF magnetron sputtering at room temperature. The structural and optical properties are studied by X-ray diffraction and double beam spectrophotometer, respectively. X-ray diffraction indicates that the Zn 3 N 2 films de