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Thermal stability of copper nitride films prepared by rf magnetron sputtering

✍ Scribed by Z.Q Liu; W.J Wang; T.M Wang; S Chao; S.K Zheng

Book ID: 108389382
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 201 KB
Volume: 325
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(98)00448-9

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