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Boron nitride films prepared by RF sputtering

✍ Scribed by Yasuda, K. ;Yoshida, A. ;Takeda, M. ;Masuda, H. ;Akasaki, I.

Publisher
John Wiley and Sons
Year
1985
Tongue
English
Weight
163 KB
Volume
90
Category
Article
ISSN
0031-8965

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