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Study of hydrogenated amorphous silicon nitride films prepared by RF magnetron sputtering

✍ Scribed by A. K. Bandyopadhyay; T. K. Bhattacharyya; Ratnabali Banerjee; A. K. Batabyal; A. K. Barua

Publisher
Springer
Year
1991
Tongue
English
Weight
456 KB
Volume
52
Category
Article
ISSN
1432-0630

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Polycrystalline Zn 3 N 2 films are prepared on Si and quartz glass substrates by RF magnetron sputtering at room temperature. The structural and optical properties are studied by X-ray diffraction and double beam spectrophotometer, respectively. X-ray diffraction indicates that the Zn 3 N 2 films de