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Hydrogenated amorphous silicon films deposited by DC planar magnetron reactive sputtering

✍ Scribed by Mustafa Pinarbasi; Lih Hsin Chou; Nagi Maley; Alan Myers; David Leet; John A. Thornton

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 876 KB
Volume: 3
Category: Article
ISSN: 0749-6036
DOI: 10.1016/0749-6036(87)90203-5

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