AlN-films prepared by dc reactive magnetron sputtering. AlN in an Ar+N 2 gas mixture have been prepared and their microstructure, hardness, refractive index and IR transmittance examined. At l = 640 nm the refractive index was 1.93 and k = 3×10 -3 ; high transmission occurred between [??] structure
✦ LIBER ✦
Cu–In–O composite thin films deposited by reactive DC magnetron sputtering
✍ Scribed by Fan Ye; Xing-Min Cai; Fu-Ping Dai; Shou-Yong Jing; Dong-Ping Zhang; Ping Fan; Li-Jun Liu
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 452 KB
- Volume
- 406
- Category
- Article
- ISSN
- 0921-4526
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