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Annealing behavior of hydrogenated amorphous silicon—nitrogen alloy films prepared by sputtering

✍ Scribed by A. Morimoto; S. Oozora; M. Kumeda; T. Shimizu

Publisher: John Wiley and Sons
Year: 1983
Tongue: English
Weight: 351 KB
Volume: 119
Category: Article
ISSN: 0370-1972
DOI: 10.1002/pssb.2221190233

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