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The preparation of cubic boron nitride films by reactive diode sputtering

✍ Scribed by K.H. Seidel; K. Reichelt; W. Schaal; H. Dimigen

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 440 KB
Volume: 151
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90238-0

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