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Strain relaxation by stripe patterning in Si/Si1 − xGex/Si(100) heterostructures

✍ Scribed by Jangwoong Uhm; Masao Sakuraba; Junichi Murota

Book ID: 108289127
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 217 KB
Volume: 508
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.08.396

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