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{3 1 1} Defect evolution in Si-implanted Si1−xGex alloys

✍ Scribed by Robert T. Crosby; Kevin S. Jones; Mark E. Law; A.Nylandsted Larsen; J.Lundsgaard Hansen

Book ID: 104420706
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 174 KB
Volume: 6
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(03)00087-8

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{3&#xa0;1&#xa0;1} Defect evolution in Si-implanted Si1−xGex alloys

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