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Local strain in Si/Si0.6Ge0.4/Si(100) heterostructures by stripe-shape patterning

✍ Scribed by Jangwoong Uhm; Masao Sakuraba; Junichi Murota

Book ID: 108290191
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 315 KB
Volume: 517
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2008.08.094

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