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Stability of cavities formed by He+ implantation in silicon

✍ Scribed by F. Roqueta; A. Grob; J.J. Grob; R. Jérisian; J.P. Stoquert; L. Ventura


Book ID
114170517
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
539 KB
Volume
147
Category
Article
ISSN
0168-583X

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