Gettering of Diffused Au and of Cu and Ni Contamination in Silicon by Cavities Induced by High Energy He Implantation

✍ Scribed by R. El Bouayadi; G. Regula; B. Pichaud; M. Lancin; CR. Dubois; E. Ntsoenzok

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 267 KB
• Volume: 222
• Category: Article
• ISSN: 0370-1972
• DOI: 10.1002/1521-3951(200011)222:1<319::aid-pssb319>3.0.co;2-q