Strong segregation gettering of transition metals by implantation-formed cavities and boron-silicide precipitates in silicon

✍ Scribed by S.M. Myers; G.A. Petersen; D.M. Follstaedt; T.J. Headley; J.R. Michael; C.H. Seager

• Book ID: 114168391
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 824 KB
• Volume: 120
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)00476-4