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Gettering of platinum and silver to cavities formed by hydrogen implantation in silicon

✍ Scribed by A. Kinomura; J.S. Williams; J. Wong-Leung; M. Petravic


Book ID
114168812
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
410 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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