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Lateral gettering of iron and platinum by cavities induced by helium implantation in silicon

✍ Scribed by F Roqueta; L Ventura; J.J Grob; R Jérisian


Book ID
114164420
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
100 KB
Volume
178
Category
Article
ISSN
0168-583X

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