✦ LIBER ✦
Combined impurity gettering effects of helium-induced cavities and oxygen precipitates created by plasma immersion ion implantation
✍ Scribed by Jing Min; Paul K. Chu; Xiang Lu; S. Sundar Kumar Iyer; Nathan W. Cheung
- Book ID
- 108389061
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 380 KB
- Volume
- 300
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.