✦ LIBER ✦

Gettering of transition metals by cavities in silicon formed by helium ion implantation

✍ Scribed by G.A. Petersen; S.M. Myers; D.M. Follstaedt

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Proximity gettering of transition metals

✍ M.H.F. Overwijk; J. Politiek; R.C.M. de Kruif; P.C. Zalm 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 537 KB

Strong segregation gettering of transiti

✍ S.M. Myers; G.A. Petersen; D.M. Follstaedt; T.J. Headley; J.R. Michael; C.H. Sea 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 824 KB

Lateral gettering of iron and platinum b

✍ F Roqueta; L Ventura; J.J Grob; R Jérisian 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 100 KB

Gettering of platinum and silver to cavi

✍ A. Kinomura; J.S. Williams; J. Wong-Leung; M. Petravic 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 410 KB

Boron gettering on cavities induced by h

✍ F. Roqueta; D. Alquier; L. Ventura; Ch. Dubois; R. Jérisian 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 218 KB

Ion channeling study of cavities in sili

✍ R. Moons; W. Deweerd; H. Pattyn; A. Vantomme; G. Langouche 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 385 KB