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Ion channeling study of cavities in silicon formed by He implantation

✍ Scribed by R. Moons; W. Deweerd; H. Pattyn; A. Vantomme; G. Langouche


Book ID
114168829
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
385 KB
Volume
127-128
Category
Article
ISSN
0168-583X

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