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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII - MEMS gratings for wavemeters and tunable light sources

✍ Scribed by Tormen, Maurizio; Overstolz, Thomas; Dasen, Stéphan; Porchet, Jaques-André; Ischer, Réal; Timotijevic, Branislav; Stanley, Ross; Ramesham, Rajeshuni; Shea, Herbert R.

Book ID: 120429658
Publisher: SPIE
Year: 2013
Weight: 643 KB
Volume: 8614
Category: Article
DOI: 10.1117/12.2000530

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