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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII - Influence of ceramic package internal components on the performance of vacuum sealed uncooled bolometric detectors

✍ Scribed by Paquet, Alex; Deshaies, Sébastien; Desroches, Yan; Whalin, Jeff; Topart, Patrice; Ramesham, Rajeshuni; Shea, Herbert R.

Book ID: 120427739
Publisher: SPIE
Year: 2013
Weight: 492 KB
Volume: 8614
Category: Article
DOI: 10.1117/12.2005945

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