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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - A 2-DOF MEMS positioning system

✍ Scribed by Sivakumar, Ganapathy; Mathews, James; Dallas, Tim E.; Kullberg, Richard C.; Ramesham, Rajeshuni

Book ID: 120833307
Publisher: SPIE
Year: 2010
Weight: 521 KB
Volume: 7592
Category: Article
DOI: 10.1117/12.842435

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