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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - Characterization of Au/Au, Au/Ru, and Ru/Ru ohmic contacts in MEMS switches improved by a novel methodology

✍ Scribed by Broue, Adrien; Dhennin, Jérémie; Courtade, Frédéric; Dieppedale, Christel; Pons, Patrick; Lafontan, Xavier; Plana, Robert; Kullberg, Richard C.; Ramesham, Rajeshuni

Book ID: 120665613
Publisher: SPIE
Year: 2010
Weight: 807 KB
Volume: 7592
Category: Article
DOI: 10.1117/12.840979

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