SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - Characterization of polymeric getter materials for MEMS/MOEMS and other microelectronic package service

✍ Scribed by Kullberg, Richard C.; Phillip, Bradley L.; Kullberg, Richard C.; Ramesham, Rajeshuni

• Book ID: 121473490
• Publisher: SPIE
• Year: 2010
• Weight: 315 KB
• Volume: 7592
• Category: Article
• DOI: 10.1117/12.843859