SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII - Robustness and reliability of MOEMS for miniature spectrometers

✍ Scribed by Rissanen, A.; Broas, M.; Hokka, J.; Mattila, T.; Antila, J.; Laamanen, M.; Saari, H.; Ramesham, Rajeshuni; Shea, Herbert R.

• Book ID: 120025806
• Publisher: SPIE
• Year: 2013
• Weight: 737 KB
• Volume: 8614
• Category: Article
• DOI: 10.1117/12.2000495