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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X - Effects of radiation on MEMS

✍ Scribed by Shea, Herbert R.; Garcia-Blanco, Sonia; Ramesham, Rajeshuni

Book ID: 120269782
Publisher: SPIE
Year: 2011
Weight: 408 KB
Volume: 7928
Category: Article
DOI: 10.1117/12.876968

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