SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] MOEMS and Miniaturized Systems X - Development of on-CMOS chip micro-photonic and MOEMS systems

✍ Scribed by Snyman, Lukas W.; Okhai, Timothy; Bourouina, Tarik; Noell, Wilfried; Schenk, Harald; Piyawattanametha, Wibool

• Book ID: 121195264
• Publisher: SPIE
• Year: 2011
• Weight: 840 KB
• Volume: 7930
• Category: Article
• DOI: 10.1117/12.873353