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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS and Miniaturized Systems V - Applications and requirements for MEMS scanner mirrors

✍ Scribed by Wolter, Alexander; Hsu, Shu-Ting; Schenk, Harald; Lakner, Hubert K.; El-Fatatry, Ayman

No coin nor oath required. For personal study only.

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