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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS Display and Imaging Systems III - Integrated deformable mirror on silicon for optical data storage

โœ Scribed by Fanget, Stephane; Labeye, Pierre R.; Divoux, Claire; Hugon, Xavier; Urey, Hakan; Dickensheets, David L.


Book ID
120410414
Publisher
SPIE
Year
2005
Weight
284 KB
Volume
5721
Category
Article

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