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SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] MEMS Adaptive Optics III - Novel construction of a deformable mirror for laser beam shaping

✍ Scribed by Bruchmann, Claudia; Eberhardt, Ramona; Beckert, Erik; Peschel, Thomas; Gramens, Steffen; Gebhardt, Sylvia E.; Tünnermann, Andreas; Olivier, Scot S.; Bifano, Thomas G.; Kubby, Joel A.

Book ID: 120666304
Publisher: SPIE
Year: 2009
Weight: 593 KB
Volume: 7209
Category: Article
DOI: 10.1117/12.809557

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