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SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Micromachining and Microfabrication Process Technology XIV - Pulsed laser breaking technique for glass substrates

✍ Scribed by Tsai, Chwan-Huei; Chang, Wei-Han; Maher, Mary-Ann; Chiao, Jung-Chih; Resnick, Paul J.

No coin nor oath required. For personal study only.

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