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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Effects of laser-induced plasma in machining of transparent materials

โœ Scribed by Kadan, Viktor M.; Blonsky, Ivan V.; Salnikov, Vadim O.; Orieshko, Evgen V.; Maher, Mary-Ann; Stewart, Harold D.


Book ID
120071994
Publisher
SPIE
Year
2005
Weight
428 KB
Volume
5715
Category
Article

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