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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Thick single-crystal silicon MEMS with high-aspect-ratio vertical air gaps

✍ Scribed by Monajemi, Pejman; Ayazi, Farrokh; Maher, Mary-Ann; Stewart, Harold D.

No coin nor oath required. For personal study only.

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