✦ LIBER ✦

SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Uniformity-improving dummy structures for deep reactive ion etching (DRIE) processes

✍ Scribed by Jensen, Soren; Jensen, Jonas M.; Quaade, Ulrich J.; Hansen, Ole; Maher, Mary-Ann; Stewart, Harold D.

No coin nor oath required. For personal study only.

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