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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Micromachining and Microfabrication Process Technology XI - Fabrication of micro-chambers and enclosures using synchronous localized electro-deposition

✍ Scribed by Said, R. A.; Maher, Mary-Ann; Stewart, Harold D.; Chiao, Jung-Chih

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