SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Micromachining Technology for Micro-Optics and Nano-Optics IV - Investigation of the III-V oxidation process for the fabrication of sub-micron three dimensional photonic devices

✍ Scribed by Swaminathan, Kierthi; Murakowski, Janusz; Schuetz, Chris; Schneider, Garrett J.; Citla, Bhargav S.; Prather, Dennis W.; Johnson, Eric G.; Nordin, Gregory P.; Suleski, Thomas J.

• Book ID: 120933381
• Publisher: SPIE
• Year: 2006
• Weight: 217 KB
• Volume: 6110
• Category: Article
• DOI: 10.1117/12.647157