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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining Technology for Micro-Optics and Nano-Optics III - Fabrication techniques for low-loss silicon nitride waveguides

✍ Scribed by Shaw, Michael J.; Guo, Junpeng; Vawter, Gregory A.; Habermehl, Scott; Sullivan, Charles T.; Johnson, Eric G.; Nordin, Gregory P.; Suleski, Thomas J.

Book ID: 121292068
Publisher: SPIE
Year: 2005
Weight: 440 KB
Volume: 5720
Category: Article
DOI: 10.1117/12.588828

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