SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] MOEMS and Miniaturized Systems XII - A new fabrication method for nano-gratings based on the high flexibility of PDMS

✍ Scribed by Cui, Min; Piyawattanametha, Wibool; Park, Yong-Hwa; Zhang, Yong; Zhang, Binzhen; Wang, Wanjun

• Book ID: 120627285
• Publisher: SPIE
• Year: 2013
• Weight: 370 KB
• Volume: 8616
• Category: Article
• DOI: 10.1117/12.2008389