SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] MOEMS and Miniaturized Systems XII - A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator

✍ Scribed by Tian, Feng; Piyawattanametha, Wibool; Park, Yong-Hwa; Zhou, Guangya; Chau, Fook Siong; Deng, Jie; Akkipeddi, Ramam; Tang, Xiaosong; Teo, Siew Lang; Loke, Yee Cheong

• Book ID: 120631977
• Publisher: SPIE
• Year: 2013
• Weight: 682 KB
• Volume: 8616
• Category: Article
• DOI: 10.1117/12.2005606