SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] MOEMS and Miniaturized Systems XII - Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology

✍ Scribed by Kronast, Wolfgang; Piyawattanametha, Wibool; Park, Yong-Hwa; Mescheder, Ulrich; Müller, Bernhard; Huster, Rolf

• Book ID: 121411662
• Publisher: SPIE
• Year: 2013
• Weight: 694 KB
• Volume: 8616
• Category: Article
• DOI: 10.1117/12.2001229