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Specific features of relief formation on silicon etched by a focused ion beam

✍ Scribed by N. N. Gerasimenko; A. A. Chamov; N. A. Medetov; V. A. Khanin

Book ID: 111450861
Publisher: SP MAIK Nauka/Interperiodica
Year: 2010
Tongue: English
Weight: 646 KB
Volume: 36
Category: Article
ISSN: 1063-7850
DOI: 10.1134/s1063785010110064

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