Radiation effects on compound formation in palladium-implanted silicon using a focused ion beam machine

✍ Scribed by Sridhar Balakrishnan; Krishna Rajan; John C. Corelli

• Book ID: 107810342
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 748 KB
• Volume: 169
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(89)90523-0