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Nanostructure fabrication by reactive-ion etching of laser-focused chromium on silicon

✍ Scribed by J.J. McClelland; R. Gupta; R.J. Celotta; G.A. Porkolab

Publisher: Springer
Year: 1998
Tongue: English
Weight: 392 KB
Volume: 66
Category: Article
ISSN: 0721-7269
DOI: 10.1007/s003400050361

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