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Growth characteristics evaluations on the 3D nanostructure fabrication by the high accuracy control of focused-ion-beam

✍ Scribed by Reo Kometani; Takayuki Hoshino; Shin’ichi Warisawa; Sunao Ishihara

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 465 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.01.037

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