The 3D nanostructure growth evaluations by the real-time current monitoring on focused-ion-beam chemical vapor deposition

✍ Scribed by Reo Kometani; Shin’ichi Warisawa; Sunao Ishihara

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 529 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.11.095