✦ LIBER ✦
Comparison of CoSi2 interconnection lines on crystalline and noncrystalline silicon fabricated by writing focused ion beam implantation
✍ Scribed by J. Teichert; L. Bischoff; E. Hesse; P. Schneider; D. Panknin; T. Gessner; B. Löbner; N. Zichner
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 801 KB
- Volume
- 91
- Category
- Article
- ISSN
- 0169-4332
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