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Systematic features of the formation of semiconductor nanostructures using a focused ion beam

✍ Scribed by A. V. Bessonova, V. K. Nevolin, A. V. Romashkin, K. A. Tsarik

Book ID: 120808662
Publisher: Springer
Year: 2012
Tongue: English
Weight: 243 KB
Volume: 46
Category: Article
ISSN: 1063-7826
DOI: 10.1134/S1063782612130052

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