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Formation of narrow grooves on thin metal layer by focused ion beam etching

✍ Scribed by M. Yoshida; S. Murakami; M. Nakayama; J. Yanagisawa; F. Wakaya; T. Kaito; K. Gamo

Book ID: 114155260
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 772 KB
Volume: 57-58
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(01)00444-0

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